发明名称 HOLDER DEVICE, CHAMBER DEVICE, AND EXTREME-ULTRAVIOLET LIGHT GENERATING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To stabilize the optical characteristics of an optical element. <P>SOLUTION: The holder device can be attached to a pressure bulkhead isolating two spaces having a pressure difference, and can hold a transmissive optical element. The holder device may include a holder section having a first section arranged in the low pressure side space for the optical element out of the two spaces, and a second section arranged in the high pressure side space for the optical element out of the two spaces, and a first sealing member sealing between the second section and the optical element. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013115176(A) 申请公布日期 2013.06.10
申请号 JP20110259000 申请日期 2011.11.28
申请人 GIGAPHOTON INC 发明人 FUJIMOTO JUNICHI;KAMEDA HIDENOBU;WAKABAYASHI OSAMU;ASHIKAWA KOJI
分类号 H01L21/027;H05G2/00 主分类号 H01L21/027
代理机构 代理人
主权项
地址