发明名称 CURABLE COMPOSITION AND PATTERNING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a curable composition from which a mold can be released simply in a short time after photo-curing with a small release force, and to provide a patterning method requiring a small release force. <P>SOLUTION: The curable composition has a polymerizable monomer and a polymerization initiator. The polymerization initiator initiates polymerization of the polymerizable monomer, and the curable composition is cured when the polymerizable monomer is polymerized. The curable composition also has a gas generation agent which generates gas by receiving a pressure. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013115196(A) 申请公布日期 2013.06.10
申请号 JP20110259271 申请日期 2011.11.28
申请人 CANON INC 发明人 IIDA KENICHI;ITO TOSHIKI
分类号 H01L21/027;B29C59/02;C08F2/44 主分类号 H01L21/027
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