| 摘要 |
<P>PROBLEM TO BE SOLVED: To stabilize a detection level with reduction in size and height of an oscillating sensor device in which an oscillating sensor element is disposed within a package. <P>SOLUTION: In an oscillating sensor device accommodating, within a package 1, an oscillating sensor element 2 which is suspended to be oscillated on a lower cover 5 and a control circuit element 3 which controls the oscillating sensor element 2, an expanded part 19 is provided in a boundary portion between a connection part 6 and a support part 7 of the oscillating sensor element 2 or in a portion of the lower cover 5 confronted with the boundary portion, and the expanded part 19 is formed as a portion where no adhesive 20 flows in. <P>COPYRIGHT: (C)2013,JPO&INPIT |
