| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device which clearly identifies the outer edge of a transparent film formed on a substrate, allowing a film formation pattern to be accurately inspected. <P>SOLUTION: A transparent film inspection device 1 comprises: an observation optical system 10 which forms an observation image of a target inspection range including the outer edge Me of a transparent film M; an illumination light source 20 from which illumination light is applied onto a substrate S including the target inspection range; and a light shielding member 30 which is disposed in a light path of the observation optical system 10 so as to shield a part of the light path. The light shielding member 30 is formed of a light shielding part including a semi-light shielding part of which brightness gradually increases from a full light shielding part in the observation image. The light shielding part is arranged to cover the image of the external edge Me of the transparent film M. The observation optical system 10 allows the light reflected on the side face of the external edge Me of the transparent film M to form an image in the observation image, so that the line image of the external edge Me of the transparent film M is formed, the transparent film M having high contrast at the light shielding part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
