PVD APPARATUS AND METHOD WITH DEPOSITION CHAMBER HAVING MULTIPLE TARGETS AND MAGNETS

摘要

PURPOSE: A PVD apparatus having targets and magnets formed in a deposition chamber and a method are provided to improve uniformity by depositing different materials on a substrate. CONSTITUTION: A target device includes a target assembly(4). The target assembly includes a target member and a magnet(16). The target assembly has a controllable power source. A stage accommodates a workpiece. The target assembly includes a ring-shaped target member.