| 摘要 |
<P>PROBLEM TO BE SOLVED: To design a driving system that drives a plate stage and is robust in a high bandwidth. <P>SOLUTION: An interferometer 18X<SB POS="POST">1</SB>for measuring a position (a second amount of control) X<SB POS="POST">2</SB>of a plate stage PST is set on a carriage 30 indicating a resonance mode of a reverse phase to a resonance mode indicated by a plate table PTB on which an interferometer 18X is set for measuring a position (a first amount of control) X<SB POS="POST">1</SB>of the plate stage PST driven according to an amount of operation. By using the interferometers 18X and 18X<SB POS="POST">1</SB>, the drive system that drives the plate stage PST and is robust in a high bandwidth can be designed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
