| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for producing trichlorosilane, by which a copper-based catalyst is smoothly removed and high purity trichlorosilane can be produced. <P>SOLUTION: The method for producing trichlorosilane comprises reacting a mixed gas containing tetrachlorosilane and hydrogen with metal silicon in the presence of a copper-based catalyst. The method includes: a heating process for heating the mixed gas to a temperature at which a reaction occurs; a conversion reaction process for forming a reaction gas containing trichlorosilane by reacting the mixed gas heated in the heating process with the metal silicon; a dust removing process for removing a solid content contained in the reaction gas; a heat exchange process for exchanging heat between the reaction gas and the mixed gas and sending the resulting mixed gas to the heating process; and a catalyst removing process for removing the copper-based catalyst precipitated in the reaction gas that is cooled in the heat exchange process. <P>COPYRIGHT: (C)2013,JPO&INPIT |
