| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a lighting device which allows each of a plurality of inspection object regions of an inspection object to be properly illuminated, achieving reduced inspection time with high inspection accuracy. <P>SOLUTION: A lighting device comprises: a plurality of light source devices LG, LB, and LR which emit color light beams different from each other; a spacial light modulation element 25 which modulates the light beams from the respective light source devices; a projection optical system 28 which projects tha light beam from the spacial light modulation element on a test surface Sa of a base plate S; and an image display control part 74 which controls the spacial light modulation element in accordance with a predetermined image signal so as to form a projection pattern of the light beam from the projection optical system. The image signal for forming the projection pattern is created based on the position data of the inspection object region on the test surface. This allows a spacial light modulation element control part to form a projection pattern including an image region in accordance with the inspection object region. <P>COPYRIGHT: (C)2013,JPO&INPIT |
