ELECTROSTATIC CHUCK ROBOTIC SYSTEM

摘要

PURPOSE: An electrostatic chuck robot system is provided to facilitate a carrying process by mounting an object carrier on the arm of a robot. CONSTITUTION: A blade(106) includes electrodes. A joint(120) includes a first transformer coil and a second transformer coil. The joint produces a mutual inductance between the first transformer coil and the second transformer coil. The joint supplies contactless power to the first transformer coil and the second transformer coil. A pair of arms(116A,116B) is rotatably connected to the blade. [Reference numerals] (128) Power source; (136) Control unit