| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a photoelectric conversion element, which is capable of improving productivity, and to provide a photoelectric conversion element. <P>SOLUTION: The method for manufacturing a photoelectric conversion element of the present invention comprises: a preparation step of preparing a semiconductor substrate 2 having a photoelectric conversion layer 2a for photoelectrically converting incident light; a deposition step of depositing an aluminum film 4 on a main surface 2A of the semiconductor substrate 2 in an atmosphere containing oxygen; and a heating step of heating the aluminum film 4 in an atmosphere containing oxygen at a concentration higher than that in the deposition step, to form an oxide film 3 on a surface of the aluminum film 4. <P>COPYRIGHT: (C)2013,JPO&INPIT |
