| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify a working step by forming a scribe line having a vertical crack reaching the rear surface, only by a scribing operation of a brittle material substrate without requiring a conventional breaking step. <P>SOLUTION: When performing splitting, information (the thickness, the kind or the like) on the brittle material substrate is inputted, and a scribing wheel corresponding to the information of the thickness or the like is selected and mounted on a scribe head. Scribing is performed by applying a prescribed scribe load corresponding to the thickness of the brittle material substrate, and thereby a scribe line having a vertical crack reaching the rear surface can be formed (fully cut) without requiring a conventional breaking step. <P>COPYRIGHT: (C)2013,JPO&INPIT |
