| 摘要 |
FIELD: transport.SUBSTANCE: method of manufacturing at least two types of electromechanical devices with different released states after removal of temporary layer consists in the following. Substrate is taken; the first conductive layer is formed on at least art of substrate. On at least part of the first conductive layer, the first temporary layer is created. On top of the first temporary layer, conductive movable elements are created each one of which has deformable layer made capable to move in gap after the said temporary layer has been removed. On top of substrate, flexion regulators are created. These regulators are made with possibility to support conductive movable elements after the first temporary layer has been removed. In this process, at least part of at least one flexion regulator is connected with part of deformable layer of movable element and is located above it so that the mentioned part of deformable layer connected with at least one of flexion regulators is located between the mentioned at least one flexion regulator and substrate. The first temporary layer is made with possibility of removal to release electromechanical devices and create by means of flexion regulators the gaps of various depths between the first conductive layer and movable elements.EFFECT: higher efficiency of the method.31 cl, 43 dwg |
