| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator allowed to be used in a temperature range from a room temperature up to a high temperature of 1000°C or more, capable of corresponding to a sudden temperature change and excellent in durability, and to provide a temperature sensor using the piezoelectric vibrator. <P>SOLUTION: Excitation electrodes are respectively formed on a surface and a rear face of a tabular piezoelectric vibrator chip and a material of the piezoelectric vibrator chip is composed of an oxide crystal material having a langasite structure. Each of the excitation electrodes includes a first metallic thin film containing at least one sort of metal elements composing the oxide crystal material, a second metallic thin film containing at least one sort of platinum-group elements and a third metallic thin film containing at least one sort of high melting-point metal elements. As the oxide crystal material, LTG or LTGA is preferable. <P>COPYRIGHT: (C)2013,JPO&INPIT |
