| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device capable of achieving a low height. <P>SOLUTION: A piezoelectric device includes an element mounting member, a piezoelectric element, an integrated circuit element, and a lid member. The element mounting member has a substrate portion in which an electrode pad is formed on one primary surface, a side-wall portion formed on an outer edge of the substrate portion, a first element mounting region surrounded by the one primary surface of the substrate portion and the side-wall portion, and a second element mounting region surrounded by the other primary surface of the substrate portion and the side-wall portion. The piezoelectric element is disposed in the first element mounting region and is connected to the electrode pad. The integrated circuit element is disposed in the second element mounting region. The lid member airtightly seals the first element mounting region. The element mounting member further includes lead-out wiring electrically connected to the electrode pad and a via conductor electrically connected between the lead-out wiring and the integrated circuit element, and the via conductor is formed in the side-wall portion. <P>COPYRIGHT: (C)2013,JPO&INPIT |
