| 发明名称 |
MODULE FOR SUPPLYING LIQUID |
| 摘要 |
<p>PURPOSE: A chemical solution supply module is provided to omit a driving part by forming an oscillation structure vibrated by pressure of a chemical solution, to simplify a structure. CONSTITUTION: A chemical solution supply unit supplies a chemical solution. A chemical solution supply pipe(220) provides the fluid path of the chemical solution. A nozzle unit(250) sprays the chemical solution to a substrate. The nozzle unit includes a nozzle body(251) and a nozzle pipe(253) extended from the nozzle body. A nozzle tip(240) is protruded from the chemical solution supply pipe.</p> |
| 申请公布号 |
KR20130060810(A) |
申请公布日期 |
2013.06.10 |
| 申请号 |
KR20110127073 |
申请日期 |
2011.11.30 |
| 申请人 |
SEMES CO., LTD. |
发明人 |
JEON, HAHN SEOK;CHOI, DONG MIN |
| 分类号 |
H01L21/302;H01L21/027 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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