| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance cleaning quality by removing deposits on the work surface without damaging a work after the cutting work. <P>SOLUTION: A water supply pipe 45 connected with a nozzle 41 is connected with a micro nano bubble generator 49 generating micro nano bubbles B in pure water, and the tip of the nozzle 41 is disposed in the vicinity of the cleaned part of a work W. A pressure maintenance valve 51 is provided at the outlet of the nozzle 41, and cleaning solution C containing micro nano bubbles B in pressurized supersaturation state generated from the micro nano bubble generator 49 is discharged from the nozzle 41 while cleaning, and supplied to the cleaned part of a work W from a close range. <P>COPYRIGHT: (C)2013,JPO&INPIT |
