VERTICLE CAPACITOR AND METHOD OF FORMING THE SAME

摘要

PURPOSE: A vertical capacitor and a method for forming the same are provided to be manufactured in a substrate without a separate package. CONSTITUTION: An input electrode(14) and an output electrode(15) are formed in the upper surface(10a) of a substrate(10). A conductive material is formed in a first via hole formed by etching the lower surface(10b) of the substrate. The conductive material is connected to the input electrode and the output electrode. An input via electrode(24) and an output via electrode(25) are formed in the substrate. A dielectric layer(37) is formed between the input via electrode and the via electrode.