PURPOSE: A load lock chamber is provided to prevent a vacuum angle valve and a vacuum pipe from being protruded from a body, and to reduce the size of a footprint. CONSTITUTION: A body(110) has vacuum chambers. Valve mounting holes are formed on the upper and the lower part of the body. A pipe mounting hole connects the valve mounting holes. Vacuum angle valves(120a,120b) open and close the fluid paths of the valve mounting holes. A vacuum pipe(130) provides vacuum pressure to a vacuum chamber.
