| 摘要 |
<p>The invention relates to a micropump having a deformable membrane, comprising: a first chamber (15), one wall of which comprises a first deformable membrane portion and means (72, 81, 83) for actuating said first membrane portion; a second chamber (11) provided with a second deformable membrane portion (11'); and a third chamber (13) provided with a third deformable membrane portion (13'), the second chamber and the third chamber being connected to one another by a first channel (12), at least one of said chambers being connected to the first chamber (15) by a second channel (12, 14), wherein both the second chamber (11) and the third chamber (13) comprise detection gauge means (R1-R4, R'1-R'4), respectively, but are not provided with actuation means.</p> |
