GAS SENSOR AND FABRICATION METHOD FOR THE SAME

摘要

PURPOSE: A gas sensor and a manufacturing method thereof are provided to maximize sensing efficiency of propane gas and methane gas when cracks are generated in the inside of a gas tank by external impact and thermal expansion of LNG/LPG(Liquefied Natural Gas/Liquefied Petroleum Gas). CONSTITUTION: A gas sensor manufacturing method is as follows: An alumina substrate is prepared. First and second electrode patterns are formed on the top surface of the alumina substrate. A nanothick SnO2 film is formed on the top surface of the alumina substrate where the first and second electrode patterns are formed. A nanothick ZnO film which constitutes a predetermined portion of the top surface of the nanothick SnO2 film is formed. The nanothick SnO2 film around the ZnO is exposed. The nanothick ZnO film constitutes 30-50% of a total area of the nanothick SnO2 film. [Reference numerals] (AA) Substrate