| 摘要 |
PURPOSE: A device for inspecting foreign materials of an organic light emitting diode is provided to minimize errors of detecting defects or the foreign materials on the surface of the organic light emitting diode, thereby obtaining the organic light emitting diode of a high quality. CONSTITUTION: A device for inspecting foreign materials of an organic light emitting diode(D) comprises a 2D light collecting and scanning unit(100), a detecting unit(200), and a readout unit. A target organic light emitting diode, which is obtained by depositing an organic EL layer and a TFT layer, is loaded on a stage so that the foreign materials on the surface of the organic light emitting diode are inspected. The 2D light collecting and scanning unit collects horizontal line beams incident into the organic light emitting diode, makes the line beams incident to an X-axis and a Y-axis, and scans foreign materials on the surface of the organic EL layer or between the organic EL layer and the TFT layer of the organic light emitting diode. The line beams incident into the organic light emitting diode by the 2D light collecting and scanning unit are reflected and emitted, and the detecting unit detects the line beams. The readout unit reads the foreign materials on the surface of the organic light emitting diode or between the organic EL layer and the TFT layer by using images of the line beam detected by the detecting unit.
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