TILTING ACTUATOR WITH CLOSE-GAP ELECTRODES

摘要

A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.