| 摘要 |
This disclosure provides systems, methods and apparatus for batch fabrication of a rechargeable lithium-ion battery using a silicon substrate (100) as an anode. In one aspect, a pre-formed silicon substrate (100) is provided. A plurality of first openings (105) can be formed on one side of the substrate (100), which can have a high height to width aspect ratio. A plurality of second openings can be formed alternatingly, or in interdigitated fashion, with the first openings (105) on another side of the substrate (100) that is opposite the first side. A solid electrolyte layer (120) can be deposited on the second side of the substrate (100) in the second openings, and a cathode material (125) can be formed into the second openings and over the electrolyte layer (120) on the second side of the substrate (100). |
