| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser decontamination device which can secure enough energy density to even remove RI entered the inside of a contaminant, does not cause irradiation unevenness even when the surface of the contaminant is irregular, prevents the spread of RI and recontamination due to thermal influence of laser processing, has excellent work efficiency, and is superior economically and environmentally. <P>SOLUTION: A laser decontamination device comprises: a laser oscillator 1; a scanner device 2 which includes an XY axis scanner 21 and a Z axis scanner 22, condenses a laser beam L<SB POS="POST">1</SB>emitted from the laser oscillator 1 on the surface of a contaminant T without interposing a compound lens like a fθ lens and performs optical scanning; and a surface shape measurement device 3 for the contaminant T. The Z axis scanner 22 of the scanner device 2 includes a focal position controlling unit 22b which automatically adjusts a focal position according to an irradiation position so that a focal point of the laser beam L<SB POS="POST">1</SB>is on the surface of the contaminant T on the basis of shape data acquired from the surface shape measurement device 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
