发明名称 SHEET STICKING DEVICE AND STICKING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a sheet sticking device and a sticking method capable of reducing the cost of the sheet sticking device and sticking an adhesive sheet to the side surface of a piece-like body. <P>SOLUTION: A sheet sticking device 1A which sticks an adhesive sheet AS to an adherend WF provided with a plurality of piece-like bodies CP comprises: support means 2 for supporting the adherend WF in which the adhesive sheet AS is stuck to the plurality of piece-like bodies CP; heating means 3 for heating the adhesive sheet AS stuck to the adherend WF supported by the support means 2; and spraying means 4 for spraying a gas to the adherend WF supported by the support means 2 from the adhesive sheet AS side. The spraying means 4 makes it possible to stick the adhesive sheet AS to the side surfaces CPX and CPY of each piece-like body CP by spraying the gas to the adhesive sheet AS softened by the heating means 3. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013110244(A) 申请公布日期 2013.06.06
申请号 JP20110253621 申请日期 2011.11.21
申请人 LINTEC CORP 发明人 KUROSAWA YUTA
分类号 H01L21/683;H01L21/301 主分类号 H01L21/683
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