| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a damaged image from becoming unclear in a process of overlapping data obtained from a plurality of receivers. <P>SOLUTION: An ultrasonic inspection device 10 comprises: an excitation unit 12 for exciting ultrasonic waves to a sample 20; a movement unit 14 for moving an exciting position 22, of the sample 20, for exciting the ultrasonic waves; a plurality of receivers 16a-16h that are arranged so as to be separated from a surface of the sample 20 and so that an orientation axis D is perpendicular to the surface, and that receive ultrasonic waves transmitted from the sample 20; and an operation unit 18 for overlapping ultrasonic wave signals that have been received by the respective receivers 16a-16h and that have been transmitted from the same exciting position 22. <P>COPYRIGHT: (C)2013,JPO&INPIT |
