发明名称 SEMICONDUCTOR STRUCTURE AND METHOD FOR MAKING THE SAME
摘要 The present invention relates to a semiconductor structure and a method for making the same. The method includes the following steps: (a) providing a first wafer and a second wafer; (b) disposing the first wafer on the second wafer; (c) removing part of the first wafer, so as to form a groove; (d) forming a through via in the groove; and (e) forming at least one electrical connecting element on the first wafer. Therefore, the wafers are penetrated and electrically connected by forming only one conductive via, which leads to a simplified process and a low manufacturing cost,
申请公布号 US2013143360(A1) 申请公布日期 2013.06.06
申请号 US201313759899 申请日期 2013.02.05
申请人 WANG MENG-JEN 发明人 WANG MENG-JEN
分类号 H01L21/50 主分类号 H01L21/50
代理机构 代理人
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