发明名称 FORMATION METHOD OF FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a production method of a film exhibiting excellent productivity while reducing the release force and the defects caused by foaming. <P>SOLUTION: A production method of a film includes: a step for forming a coating film (shape transferred layer 1) by applying a photocurable composition, containing a polymerizable monomer and a photosensitive gas generating agent generating gas by light stimulation, onto a substrate 2; a step for bringing the coating film into contact with a mold 3; a step for curing the coating film by irradiating the coating film with light through the mold 3 and for generating gas in the coating film; and a step for forming a film (cured film 11) having a predetermined pattern on the substrate 2 by separating the mold 3 from the coating film after irradiating the coating film with light. In the step for irradiating the coating film with light, the reaction speed of polymerization reaction of the polymerizable monomer contained in the coating film is faster than the reaction speed of gas generation reaction of the photosensitive gas generating agent contained in the coating film. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013110383(A) 申请公布日期 2013.06.06
申请号 JP20120193271 申请日期 2012.09.03
申请人 CANON INC 发明人 MATSUFUJI NAOKO;ITO TOSHIKI;KOMATSU KANAE;KITAGAWA KENJI
分类号 H01L21/027;B29C59/02;C08F2/00;C08F2/44;C08F2/48;G03F7/20 主分类号 H01L21/027
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