CHARGED PARTICLE BEAM GENERATION DEVICE AND CHARGED PARTICLE BEAM GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To stably generate fine charged particle beams.

SOLUTION: An ion beam generation device 1 comprises: a gas source 7 for generating a gas flow; a capillary tube 9 whose base end 21 is connected to the gas source and whose tip part 25 is tapered; a plate-like electrode 19 provided to surround a side face 35 of the capillary tube 9 from the outside; a pulse voltage source 11 for applying a pulse voltage to the plate-like electrode 19; and a bias voltage source 13 for applying a negative direct-current bias to a target T that is an ion beam radiation target. Plural side holes 37a, 37b are formed on a side face 36 of the capillary tube 9.

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