SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME, AND PROBE CARD

摘要

Disclosed herein are a substrate and a method for manfuacturing the same, and a probe card employing the substrate as a space transformer, the substrate including: a substrate body; a key forming groove formed in one surface of the substrate body; and an alignment key formed on the key forming groove. According to the present invention, the recognition rate of the alignment key formed on the substrate can be increased, resulting in improved accuracy in a micro electro mecanical system (MEMS) process for forming micro probes on the substrate, thereby improving productivity and reliability of the substrate and the probe card incluing the same.