发明名称 |
DEFECT CORRECTION DEVICE AND DEFECT CORRECTION METHOD |
摘要 |
<p>This defect correction device is provided with a plurality of application needles and can carry out efficient correction operations according to defects in a substrate. A defect correction device (100) is provided with: an ink application mechanism (34) that includes a plurality of needles, for which the application diameters differ, for correcting defects; an image processing unit (21) that detects defect locations in the substrate; a calculation unit (25) that calculates defect size values that show the size of defects on the basis of images for defect locations that have been detected; a selection unit (26) that selects a needle with an application diameter that should be used for correction according to the defect size value that has been calculated; and a correction processing unit (50) that corrects the defect using a needle with an application diameter that has been selected.</p> |
申请公布号 |
WO2013081109(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
WO2012JP81095 |
申请日期 |
2012.11.30 |
申请人 |
NTN CORPORATION;OHBA, HIROAKI |
发明人 |
OHBA, HIROAKI |
分类号 |
G02B5/20;G01N21/956;G02F1/13;G02F1/1335 |
主分类号 |
G02B5/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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