| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate holding device by which the whole surface of a substrate can be treated uniformly, and to provide a manufacturing method and a manufacturing apparatus for manufacturing the substrate holding device. <P>SOLUTION: When manufacturing the substrate holding device 4 having a shape, a plurality of corrugated shapes are formed at predetermined pitches in the longitudinal direction (X direction) of a metal plate 10 by pressing the long metal plate 10, and the crest 11 and the valley 12 in the corrugated shapes are curved in an arched shape along the width direction (Y direction) of the metal plate 10. The curved shape of the valley 12 to hold the substrate 9 and the curved shape of the crest 11 are formed in order by pressing and forming the valley 12 of the corrugated shape one by one in order with a predetermined pitch along the longitudinal direction of the metal plate 10. <P>COPYRIGHT: (C)2013,JPO&INPIT |
