| 摘要 |
The purpose of the present invention is to provide an image forming apparatus and a computer program such that extraction of information about distortion in a charged particle beam scan area can be implemented. An embodiment for achieving the purpose proposes: an image forming apparatus that integrates image data obtained by a charged particle beam apparatus and that calculates, from a plurality of images with different scan directions of the charged particle beam apparatus, first information about the amount of change in a feature quantity in accordance with the time of irradiation of the charged particle beam, second information about the amount of change in the feature quantity before and after a change in beam scan direction, and/or third information about a position error of a pattern on the image before and after the change in beam scan direction; and a computer program for causing a computing apparatus to perform the above process.
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