发明名称 PIEZOELECTRIC MOTOR, DRIVING DEVICE, ELECTRONIC COMPONENT CONVEYING DEVICE, ELECTRONIC COMPONENT INSPECTION DEVICE, PRINTING DEVICE, ROBOT HAND, AND ROBOT
摘要 A vibrating body is accommodated in a vibrating body case in a state where both sides of the vibrating body containing a piezoelectric material are sandwiched between buffer portions from a direction intersecting a bending direction of the vibrating body, and the buffer portions are pressed against the vibrating body using a pressing lid through elastic portions. Pressing plates are provided between the buffer portions and the elastic portions to restrict the movement of the pressing plates in a vibration direction of the vibrating body.
申请公布号 US2013141717(A1) 申请公布日期 2013.06.06
申请号 US201213705963 申请日期 2012.12.05
申请人 SEIKO EPSON CORPORATION;SEIKO EPSON CORPORATION 发明人 NISHIMURA YOSHITERU
分类号 H01L41/09;G01N21/01 主分类号 H01L41/09
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