发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A semiconductor device includes a cylindrical main pillar that is formed on a substrate and of which a central axis is perpendicular to the surface of the substrate, source and drain diffused layers that are formed in a concentric shape centered on the central axis at upper and lower portions of the main pillar and made from a first-conduction-type material, a body layer that is formed at an intermediate portion of the main pillar sandwiched between the source and drain diffused layers and made from the first-conduction-type material, and a front gate electrode that is formed on a lateral face of the main pillar while placing a gate insulating film therebetween. Moreover, a back gate electrode made from a second-conduction-type material is formed in a pillar shape penetrating from an upper portion to a lower portion on an inner side of the main pillar.
申请公布号 US2013140628(A1) 申请公布日期 2013.06.06
申请号 US201313754342 申请日期 2013.01.30
申请人 ELPIDA MEMORY, INC.;ELPIDA MEMORY, INC. 发明人 HIGASHINO TOSHIYUKI
分类号 H01L29/78 主分类号 H01L29/78
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