发明名称 Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures
摘要 A method for calculating electromagnetic scattering properties of a finite periodic structure having a direction of periodicity is disclosed. The method numerically calculates electromagnetic scattering properties using spatial discretization in the direction of periodicity and numerically calculates electromagnetic scattering properties using spectral discretization in a direction orthogonal to the direction of periodicity.
申请公布号 US2013144560(A1) 申请公布日期 2013.06.06
申请号 US201213490416 申请日期 2012.06.06
申请人 PISARENCO MAXIM;SETIJA IRWAN DANI;ASML NETHERLANDS B.V. 发明人 PISARENCO MAXIM;SETIJA IRWAN DANI
分类号 G01N21/47;G06F17/00 主分类号 G01N21/47
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