发明名称 |
Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures |
摘要 |
A method for calculating electromagnetic scattering properties of a finite periodic structure having a direction of periodicity is disclosed. The method numerically calculates electromagnetic scattering properties using spatial discretization in the direction of periodicity and numerically calculates electromagnetic scattering properties using spectral discretization in a direction orthogonal to the direction of periodicity.
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申请公布号 |
US2013144560(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201213490416 |
申请日期 |
2012.06.06 |
申请人 |
PISARENCO MAXIM;SETIJA IRWAN DANI;ASML NETHERLANDS B.V. |
发明人 |
PISARENCO MAXIM;SETIJA IRWAN DANI |
分类号 |
G01N21/47;G06F17/00 |
主分类号 |
G01N21/47 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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