发明名称 PRESSURE SENSOR HAVING NANOSTRUCTURE AND MANUFACTURING METHOD THEREOF
摘要 The present disclosure relates to a pressure sensor having a nanostructure and a method for manufacturing the same. More particularly, it relates to a pressure sensor having a nanostructure attached on the surface of the pressure sensor and thus having improved sensor response time and sensitivity and a method for manufacturing the same. The pressure sensor according to the present disclosure having a nanostructure includes: a substrate; a source electrode and a drain electrode arranged on the substrate with a predetermined spacing; a flexible sensor layer disposed on the source electrode and the drain electrode; and a nanostructure attached on the surface of the flexible sensor layer and having nanosized wrinkles.
申请公布号 US2013140611(A1) 申请公布日期 2013.06.06
申请号 US201213686375 申请日期 2012.11.27
申请人 KIM JIN SEOK;SUH JUN-KYO FRANCIS;KANG SUNG CHUL;LEE JEONG HOON 发明人 KIM JIN SEOK;SUH JUN-KYO FRANCIS;KANG SUNG CHUL;LEE JEONG HOON
分类号 H01L29/84;H01L29/66 主分类号 H01L29/84
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