发明名称 |
PRESSURE SENSOR HAVING NANOSTRUCTURE AND MANUFACTURING METHOD THEREOF |
摘要 |
The present disclosure relates to a pressure sensor having a nanostructure and a method for manufacturing the same. More particularly, it relates to a pressure sensor having a nanostructure attached on the surface of the pressure sensor and thus having improved sensor response time and sensitivity and a method for manufacturing the same. The pressure sensor according to the present disclosure having a nanostructure includes: a substrate; a source electrode and a drain electrode arranged on the substrate with a predetermined spacing; a flexible sensor layer disposed on the source electrode and the drain electrode; and a nanostructure attached on the surface of the flexible sensor layer and having nanosized wrinkles.
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申请公布号 |
US2013140611(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201213686375 |
申请日期 |
2012.11.27 |
申请人 |
KIM JIN SEOK;SUH JUN-KYO FRANCIS;KANG SUNG CHUL;LEE JEONG HOON |
发明人 |
KIM JIN SEOK;SUH JUN-KYO FRANCIS;KANG SUNG CHUL;LEE JEONG HOON |
分类号 |
H01L29/84;H01L29/66 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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