Output network for plasma supply device used for supplying plasma for manufacturing thin film for e.g. flat display screen, has output transformers which are provided for outputting the specific power at specific frequency

摘要

The output network (15) has inverters (11,12) which are provided with output transformers (17) having primary and secondary windings. One of the windings is provided with partial winding portions which are parallely and electrically connected with each other. The output transformers are provided for outputting the power greater than 500 W at a frequency of greater than or equal to 3 MHz. The output transformers are formed with several insulators on a circuit board. The recesses or trenches are provided in the circuit board. An independent claim is included for plasma supply device.