| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology pertaining to a liquid immersion objective lens that allows observation for a long time and can prevent deterioration in the optical performance caused by evaporation of immersion liquid. <P>SOLUTION: A liquid immersion objective lens 10 has a front end flat surface 4 located closest to a specimen 1 and perpendicular to the optical axis AX and a side surface 5 parallel to the optical axis AX. The liquid immersion objective lens 10 has a recess 7 provided in a front end portion 6, which is a portion extending between the front end flat surface 4 and the side surface 5. The immersion liquid 3 extends from the front end flat surface 4 to an oblique surface 8 provided at a position farther from the optical axis AX than the recess 7. In other words, the interior of the recess 7 is filled with the immersion liquid 3. <P>COPYRIGHT: (C)2013,JPO&INPIT |
