| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a probe capable of finely controlling a scrub amount by securing a large overdrive. <P>SOLUTION: The probe comprises a vertical probe extending in a vertical direction and a link mechanism composed of a pair of horizontal beams extending in a direction of crossing a vertical direction, having a linear or curve shape and extending in an almost horizontal direction, whose one end is connected to a fixed end and the other end is connected to the vertical probe. In the probe, a distance between the pair of facing horizontal beams continuously or non-continuously changes, and the distance between the horizontal beams becomes the largest in the vicinity of the fixed end and becomes the smallest in the vicinity of the vertical probe. <P>COPYRIGHT: (C)2013,JPO&INPIT |
