发明名称 |
METHOD OF FABRICATING AN OPTICAL GRATING |
摘要 |
According to embodiments of the invention, the design and fabrication of a binary superimposed grating (BSG) results in better performing devices that may be fabricated using existing technology. The fabrication process includes forming grating features based upon repeating features of the desired superposition function. The design process also relaxes the processing requirement for equivalently performing devices.
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申请公布号 |
US2013140723(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201213606221 |
申请日期 |
2012.09.07 |
申请人 |
MURAKOWSKI JANUSZ;SHI SHOUYUAN;PRATHER DENNIS W.;LUMILANT, INC. |
发明人 |
MURAKOWSKI JANUSZ;SHI SHOUYUAN;PRATHER DENNIS W. |
分类号 |
G02B5/18 |
主分类号 |
G02B5/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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