MICRO WAVE PLASMA PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a micro wave plasma processing apparatus which can easily perform a predetermined modification treatment regardless of the geometry of a target face of an object to be processed.

SOLUTION: The micro wave plasma processing apparatus 1 comprises: an inner cylindrical part 30; an outer cylindrical part 31; a waveguide 33 disposed between the inner and outer cylindrical parts 30 and 31; a slit 36 which communicates to the waveguide 33, and is narrower in width than the waveguide 33 in a direction perpendicular to an axis of the cylindrical part; and a gas supply part 35 for supplying a plasma-generation gas to the slit 36.

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