| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for working an alignment mark, which can work an alignment mark to be formed into a mark for positioning when the body to be inspected is loaded to a fixture for inspection at high precision while suppressing cost. <P>SOLUTION: A contact 33 is formed so as to be projected from the edge part of a substrate 32 by a micro-electric-mechanical system technique, simultaneously, masks 86 for alignment marking having marking holes 85 are formed so as to be projected from the edge parts of the substrate 32, and the masks 86 for alignment marking is irradiated with a laser L in a state where a probe 31 for inspection is supported to the fixed block 21 of a probe block 12 to form an alignment mark 81 to the block 13 to be inspected with the laser L passed through the marking holes 85. <P>COPYRIGHT: (C)2013,JPO&INPIT |
