发明名称 |
Carbon Nanotube Contact Structures For Use With Semiconductor Dies And Other Electronic Devices |
摘要 |
A method of making carbon nanotube contact structures on an electronic device includes growing a plurality of carbon nanotube columns on a mandrel. Electrically-conductive adhesive is applied to ends of the columns distal from the mandrel, and the columns are transferred to the electronic device. An electrically-conductive material is deposited onto some or all of the columns. The mandrel can be reused to grow a second plurality of carbon nanotube columns.
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申请公布号 |
US2013140057(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201213731259 |
申请日期 |
2012.12.31 |
申请人 |
FORMFACTOR, INC.;FORMFACTOR, INC. |
发明人 |
GRITTERS JOHN K.;MARTENS RODNEY I.;YAGLIOGLU ONNIK |
分类号 |
H01L23/00;H01B1/20 |
主分类号 |
H01L23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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