| 摘要 |
<p>A NOR flash memory array structure is provided, comprising: a substrate (100); and a two dimensional memory array structure formed on the substrate (100) and comprising: a plurality of memory cell columns arranged in a first direction, and each memory cell column including a plurality of memory cells (300), in which each memory cell (300) comprises: a channel region (308) located on the substrate (100), a gate structure located on the channel region (308) and formed by a tunneling oxide layer (304), a silicon nitride layer (303), a barrier oxide layer (302) and a polysilicon gate layer (301) stacked sequentially, a source region (306) and a drain region (305) located at a first edge and a second edge of the gate structure respectively; a plurality of word lines WL; a source line SL for connecting the source regions of all the memory cells; and a plurality of bit lines BL.</p> |
