| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film thickness inconsistency detection device that permits, even where two-dimensional illumination with an array of many light emitting diodes (LEDs) is used, checking up in a short period of time while keeping the luminous energy of illumination during the checkup constant, unaffected by any delay until all the LEDs are lit, and a coating apparatus equipped with the device. <P>SOLUTION: A device for detecting any film thickness inconsistency of a coat formed over a base plate comprises a base plate holder, a light source, an image pickup unit, a controller and a checkup unit. The light source provides two-dimensional illumination with an array of multiple light emitting diodes (LEDs). The controller comprises a light turning-on delay time register that registers a light turning-on delay time from the outputting of an illuminating instruction signal until all the multiple LEDs are turned on, and an image pickup delay time register that outputs an image pickup instruction signal to the image pickup unit after the lapse of the registered light turning-on delay time from the inputting of the illuminating instruction signal. <P>COPYRIGHT: (C)2013,JPO&INPIT |
