| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a template treatment method which inhibits the deterioration of a pattern caused by cleaning. <P>SOLUTION: A template 1 includes: a substrate having a main surface; a first pattern formed on the main surface and including a recessed part; and a second pattern formed at a position, which is different from the first pattern, on the main surface and including a recessed part. Further, the first pattern includes a first material and the second pattern includes a second material which is different from the first material. A template treatment method according to one embodiment is used for performing treatment on the template 1. In the template treatment method according to the embodiment, the second pattern is covered by a cover member 11 including a third material which is different from the first and second materials. Next, the template 1 is washed with the second pattern covered with the cover member 11. Then, the cover member 11 is removed to expose the second pattern. <P>COPYRIGHT: (C)2013,JPO&INPIT |
