发明名称 |
COMPACT HIGH-VOLTAGE ELECTRON GUN |
摘要 |
<p>One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.</p> |
申请公布号 |
WO2013082080(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
WO2012US66750 |
申请日期 |
2012.11.28 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
BRODIE, ALAN;MAURINO, JOSEPH;MCCORD, MARK;PETRIC, PAUL |
分类号 |
H01J37/065;H01J37/305 |
主分类号 |
H01J37/065 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|