发明名称 COMPACT HIGH-VOLTAGE ELECTRON GUN
摘要 <p>One embodiment relates to a high-voltage electron gun including an insulator stand-off having a resistive layer. The resistive layer is at least on an interior surface of the insulator stand-off. A cathode holder is coupled to one end of the insulator stand-off, and an anode is coupled to the other end. The resistive layer advantageously increases the surface breakdown field strength for the insulator stand-off and so enables a compact design for the high-voltage electron gun. Other embodiments, aspects and feature are also disclosed.</p>
申请公布号 WO2013082080(A1) 申请公布日期 2013.06.06
申请号 WO2012US66750 申请日期 2012.11.28
申请人 KLA-TENCOR CORPORATION 发明人 BRODIE, ALAN;MAURINO, JOSEPH;MCCORD, MARK;PETRIC, PAUL
分类号 H01J37/065;H01J37/305 主分类号 H01J37/065
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