Optical component for use in illumination optics of illumination system of projection exposure system for guiding light radiation to object field, has individual mirrors with front side that forms individual mirror reflecting surface

摘要

The optical component comprises multiple individual mirrors (26), which have a front side that forms an individual mirror reflecting surface (35). The group reflecting surfaces are formed integrally apart from a distance between adjacent individual mirror reflective surfaces. The individual mirrors on its front side have a radiation absorption partial area. The radiation absorption partial area is arranged corresponding to the edge side of the group reflecting surfaces (36). The individual mirrors have identical dimensions. Independent claims are included for the following: (1) an illumination optics for guiding light radiation to an object field; (2) an illumination system has a radiation source; and (3) an optical system has an illumination optics.