| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface defect inspection device and a surface defect inspection method which surely detect mainly seed defects and scratch defects on a coated surface, relating to techniques of detecting surface defects. <P>SOLUTION: A surface defect inspection device includes: an illumination part applying an illumination pattern in which hue periodically changes at least in two directions on a plane surface to reference and inspection surfaces; an imaging part imaging the reference and inspection surfaces to which the illumination pattern has been applied; and a defect detecting part detecting the existence of defects on the inspection surface on the basis of the hue difference between both images which have been imaged by the imaging part. <P>COPYRIGHT: (C)2013,JPO&INPIT |
